软物质微纳加工实验室

软纳米平台（Soft NanoLab；SNL）是专门为了研发各类软材料、将软材料制备成各种应用器件，而创建的一个微纳加工共享平台；本平台全名为：软物质微纳加工实验室（Soft Matter Nanofabrication Laboratory）。本平台实验室位于威尼斯官网97788187号楼一层南侧，性质为电子厂房净化室，包含千级和万级两个洁净区域，共占地650平方米；本平台为小规模、高水平微纳加工实验室，将提供最先进的微纳加工设备，主要功能有光刻、蚀刻、薄膜、和器件封装与测试，专为新型软物质的器件开发提供支撑性科研服务。

软纳米平台既是物质科学与技术学院三大科研支撑平台之一，同时，也是威尼斯官网9778818重点科研资源平台之一。由上海市政府提供建设经费，在威尼斯官网9778818相关部门的合作及指导下，本平台由物质科学与技术学院主要负责相关规划筹建、以及运行。本平台的建设构想由物质科学与技术学院创建院长杨培东院士提出，主要为新能源、新生物、新量子科学发展，为不同领域的软材料器件研究提供最先进的微纳加工能力；此外，软纳米平台作为一校级大型设备共享平台，不仅对校内全面开放，更将鼓励校内外科研合作或业界产品开发，满足微纳加工需求，以实现“推进科技进步驱动产业发展”的创新价值。未来软纳米平台将致力成为一个集学、研、制、测一体化的科研平台，作为威尼斯官网9778818的科研保障基地之一。

Soft Matter Nanofabrication Laboratory, as we would abbreviate it as Soft NanoLab (SNL), is one of major shared platforms at ShanghaiTech University. This platform was founded in 2017 and the aim is to accelerate the research and development for soft materials and their device-level applications. Soft NanoLab is located in the south side of the 1^ST floor in the Building #7, of the School of Physical Science and Technology (SPST). It is a clean room for microelectronics manufacturing, and the clean room area is ~650 square meter consisting of Class 1,000 and Class 10,000 areas, specifically. Soft NanoLab considers itself as a small-scale yet high-standard platform, serving its users with state-of-the-art tools of lithography, etching, thin film growth, and packaging/testing. Our micro/nanofabrication tools are specifically for bolstering research regarding rising soft matter with potentials for future applications.

Soft NanoLab is one of the three research centers and shared platforms in the School of Physical Science and Technology. Meanwhile, it is also one of key shared resource for research at ShanghaiTech. With the financial support from Shanghai Municipal People’s Government, and with synergistic efforts of ShanghaiTech’s administrative offices, School of Physical Science and Technology is in charge of founding SNL as well as operating SNL. The initial blueprint of Soft NanoLab was originally depicted by the Founding Dean of SPST, Prof. Peidong Yang. Mainly, Soft NanoLab will provide state-of-the-art micro/nanofabrication capabilities to promote next-generation devices using soft materials for applications particularly in energy, biology, and quantum electronics. Being a major platform at a university-level, Soft NanoLab is not only open to users across the campus, but also to external users. By sharing complete capabilities in device research, Soft NanoLab encourages both academic and industrial collaborations on soft materials in their pathways towards applications. Soft NanoLab will devote future efforts in integrating functions in teaching/learning, researching, fabricating/testing, and demonstrating, in order to become a top-notch platform in ShanghaiTech.

More information：http://eshare.shanghaitech.edu.cn/spst/rnm/